Yes: https://news.ycombinator.com/item?id=40441650 "TSMC EUV machines equipped with remote self-destruct in case of invasion"

Seems like a risky move - they found just fein invasion, let them nerf their entire economy and then just go home.

A few employees with sledge hammers would be enough. These are rather delicate machines.

To render inoperable sure, but invaders would surely be able to suss out some of their secrets from the remains.

I would suggest industrial espionage and luring away employees instead of invasion, if you are after secrets.

> To render inoperable sure, but invaders would surely be able to suss out some of their secrets from the remains.

Yes, but I have a suspicion the Taiwanese plans are a bit more involved than my sledge hammer idea.